PIE Scientific Tergeo-EM Plasma Cleaner and TEM Specimen Holder Vacuum Pumping Station

The Pie Scientific Tergeo-EM is an easy to operate and capable plasma cleaner.  It is ideal for pre-cleaning TEM samples loaded onto TEM specimen holders. Its design incorporates a quartz chamber, external RF source, and three mass flow controlled regulated gas inputs, and it is capable of both direct immersion and downstream plasma processing modes. The user interface provides automatic operation capabilities, 20 recipe support and convenient process control.

The Pie Scientific TEM vacuum storage station provides a dry and clean environment for storing up to 6 TEM specimen holders.  Both the plasma cleaner and storage station support Thermo-fisher (FEI), JEOL, and Hitachi TEM compatible specimen holders.

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Key Features

• Supports Thermo-fisher (FEI), JEOL, and Hitachi TEM compatible specimen holders.
• Low contamination focused design.
• Tergeo-EM Plasma Cleaner
  • Capable of Immersion, pulsed, and downstream plasma processing modes.
  • Recipe and job sequence control.
• TEM Specimen Holder Storage Station
  • Six storage cells
    • Cells can be individually pumped or vented.

Key Applications and available processes

• Remove hydrocarbon contamination on TEM samples prior to imaging
• Remove organic contamination and activate in-situ TEM chip surfaces.
• Remove carbon deposition after STEM imaging.
• Gentle downstream and pulsed plasma modes suitable for use with ultra-thin carbon and graphene grids.
• Keep specimen holders dry and clean, reducing contamination.
• Leak check specimen holders

General Documentation

PIE Tergeo-EM system SOP (standard operation procedure)

Contact

Daniel Lamont or Susheng Tan

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Equipment Fee

Characterization Service 1