The Nanoscale Fabrication and Characterization Facility

PINSE supports the Nanoscale Fabrication and Characterization Facility (NFCF), a 4,000-ft2 cleanroom user facility located in the sub-basement of Benedum Hall. The facility is divided into two sections, Characterization and Fabrication (Cleanroom). 

New User? See the sign up process here.

Facility Map


Image of the Characterization facilityDivider

Electron Microscopes:

Scanning Probe Microscopy


Raman Microscope

X-Ray Diffraction

Sample Preparation



Fabrication (Cleanroom)

Image of the Fabrication facilityDivider


Optical Microscope

  • Zeiss Axio Imager Motorized Optical Microscope

Thin Film Deposition

  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Electron Beam Evaporator System (EBE)
  • Hybrid Sputter/Evaporation System (Deposition System AJA)

Dry Etching

  • Reactive Ion Etcher (RIE)
  • Plasma Cleaner

Surface Profiler

  • Surface Profiler: KLA Tencor Alpha-Step IQ Surface

Sample Preparation

  • Acid Hood
  • Caustic Hood