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Electron Probe Micro Analyzer

JEOL JXA-8530F Field Emission Electron Probe Microanalyzer (EPMA) with JEOL XEDS & xCLent Cathodoluminescence - This EPMA’s field emission electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a tungsten filament or a LaB6 tip. The FE electron gun is capable of producing a microprobe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for wavelength dispersive spectroscopy with high X-ray spatial resolution.

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Key Features

  • Detectable Elements:

               WDS: (Be*) B to U

               EDS: B to U

  • X-Ray Range:
  • WDS: 0.087 to 9.3 nm

               EDS energy range: 20keV

               Maximum Sample Size: 100mm x 100mm x 50mm (H)

  • Accelerating Voltage: 1 to 30 kV (0.1 kV steps)
  • Probe Current Range: 10-12 to 5x10-7
  • Beam Current Stability: ± 0.3%/h
  • 3 nm (WD 11 mm, 30kV)
  • Minimum Probe Size:

               40nm (10kV, 1x10-8A)

               100nm (10kV, 1x10-7A)

  • Scanning Magnification: 40 to 300,000x (WD 11mm)
  • Scanning Image Resolution: Maximum 5120 x 3840

 Photo of the EPMA 

General Documentation 

EPMA SOP (standard operation procedure)

 

Contact

Susheng Tan

 

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Equipment Fee

Characterization Service 3