William W. Clark Professor of Mechanical Engineering and Materials Science


Fax: 412-624-4846
218H Benedum Hall
Pittsburgh, PA


MEMS Sensors

Keywords: Chemical sensor, pH, MEMS

This project involves the fabrication of micro-scale sensing devices.  The focus is on the fabrication of several different types of chemical sensors, including devices that use potentiometric, amperometric, and resistance transduction.  Devices are fabricated using a variety of equipment in the NFCF.