Zeiss Optical Microscope

The Zeiss Axio Imager M1m optical microscope provides high-quality imaging of chemistry materials and semiconductor devices. The images can be processed via ZEN software in which the scaling and size of the object can be measured precisely.

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Key Features

  • Magnification: 10x eyepiece, overall 50x ~ 1500x
  • Motorized:
    • 6 Lens Turret, 5x, 10x, 20x, 50x, 100x, 150x
    • Focus and stage
    • Reflector Cubes (imaging modes)
  • Imaging modes:
    • Bright Field: Illumination and reflection through the lens
    • Dark Field: Oblique illumination with back reflected light through the lens
    • DIC: Circularly polarized differential interference contrast imaging
  • Measurement: scale bar, distance, area, angle, etc.

 Key Applications and available processes

  • Image semiconductor devices, cross sections of materials
  • Image specimens prior to SEM
  • Image features for quantitative image analysis
  • Measure dimensions, angles, areas of each object

General Documentation

Optical Microscope SOP (standard operation procedure)

Photo of the Optical Microscope with Zeiss Software, in CleanroomContact

Jun Chen,Daniel Lamont, or Esta Abelev

 

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Equipment Fee

Characterization Service 1