Electron Beam Evaporation System

The Thermionics ebeam evaporation system provides thin film coating of virtually any material quickly, cleanly and efficiently.  A variety of evaporation source materials are available.  The system has an ultimate vacuum on the order of 1.1 x 10-7 with a vacuum of 5 x 10-5 or better recommended for deposition. ……………………………………………………………………………………………………………………………………………………………………………………………………………………………..

Key Features

  • 3 kW 4 pocket e-Gun
  • Thickness monitor
  • Sample heater
  • Substrates up to 100 mm
  • Substrate rotation
  • Available materials: Al, Au, Ti, Ni, Cr, Ge, Ag, AuGe, Invar and other per request

 

Key Applications and available processes

  • Electronic and Optical Semiconductor films
  • Wear resistant and thermal barrier coatings

 

General Documentation

ebeam evaporation system SOP (standard operation procedure)


Contact

Michael McDonald or Matt France


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Equipment Fee

Fabrication Service 1