FEI Scios

FEI Scios Focused Ion Beam/Scanning Electron Microscope with EDAX Pegasus Hikari Super Energy Dispersive Spectrometer and Electron Backscatter Diffraction


FEI Scios

FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material. With innovative features designed to increase throughput, precision, and ease of use, the FEI Scios is ideal for advanced research and analysis across academic, government, and industrial research environments. A 110 mm stage tilts up to 90˚ and provides a long, eucentric working distance for great flexibility. FEI Scios easily accommodates a wide range of sample types and data collection techniques while simultaneously allowing maximum energy dispersive x-ray spectroscopy (EDS) signal detection at the FIB and SEM coincidence point.TEAM™ Pegasus is a world-class materials characterization solution providing users with both elemental composition and crystal structure results in one easy-to-use EDS-EBSD package. Smart Featuresin the TEAM™ software streamline analysis and facilitate workflow, while optimizing data quality and helping EDAX users solve their characterization problems quickly and more efficiently.


Technical Specs:

NICol UHR Non-Immersion FESEM Column

  • High resolution field emission-SEM column, with:
  • High stability Schottky field emission gun
  • Beam  current range: 1 pA to 400 nA
  • Accelerating voltage range: 200 eV – 30 keV

Electron Beam Resolution at Optimum Working Distance

  • 0.8 nm at 30 keV STEM
  • 1.6 nm at 1 keV

Sidewinder Ion Column

  • High-current gallium liquid metal ion source
  • Acceleration voltage: 500 V – 30 kV
  • Probe current: 0.6 pA – 65 nA in 15 steps
  • Beam blanker  standard
  • 15-position aperture strip
  • Magnification: 40× – 1.28M× based on Polaroid output
  • Drift suppression mode as standard for non-conductive samples

Ion Beam Resolution (High vacuum imaging, optimum WD)

  • 3.0 nm (statistics over 50 edges)
  • 5.0 nm (statistics over 1000's of edges)

Octane Series Silicon Drift Detectors

  • Four models designed specifically to meet the demands of key microanalysis applications: Pro, Plus, Super, Ultra
  • Mn resolutions down to 121 eV available
  • >90% resolution stability up to 200,000 cps for high quality data - fast!
  • Advanced pulse processor and tuned electronics enable system efficiencies three times higher than typical analysis systems

Hikari EBSD Camera Series

  • High speed and high sensitivity EBSD camera for maximum performance across the widest range of sample and system operating conditions
  • Integrated Forward Scatter Detector for orientation, topographic, and phase contrast imaging on tilted samples.


Safety and Training Requirements:

This device requires on-site, in person training prior to use.

FEI image



Facility: Characterization

Location: SB 60

New User? See sign up instructions here.

Existing User? Link to FOM here.

Emergencies dial 4-2121 for Pitt Police


Supervisor: Susheng Tan

Phone: 412-383-5978
Email: sut6@pitt.edu

Co-Supervisor: Matt France

Phone: 412-648-7287
Email: maf138@pitt.edu









General Contact Info:
Facility Phone: 412-383-8001
Facility Email: nfcf@nano.pitt.edu

Benedum Hall
3700 O'Hara Street
Pittsburgh, PA 15261
NFCF Lab, SB 60-63