Environmental Transmission Electron Microscope (ETEM)

Hitachi H-9500

The Hitachi H-9500 ETEM is specifically designed for in-situ observations at environmental conditions up to 10^-2 Pa. Besides regular single-tilt and double-tilt specimen holders, there is a double-tilt heating holder available for studies of specimen from room temperature up to 1000^oC with/out a gas, e.g. H₂, O₂, CO, CH₃OH, or CH₄. It also equipped with Bruker Quantax energy dispersive spectroscopy (EDS) system for elemental analysis at TEM mode.

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Technical Specs:

Item	Specification/Configuration	Notes
Resolution	0.102 nm lattice; 0.180 point
Max specimen tilt angles	+/- 15°	Specimen holder dependent
Acceleration Voltage	300 keV; 200 keV; 100 keV	300 kV standard
Magnification	Zoom1: x1,000 – x1,500,000 Zoom2 (SA): x4,000 – x500,000 Low Mag: x200 – x500
Camera Length (SAED)	0.25 – 3.0 m (5 steps)	Rotation corrected
Spot size	Micro: 0.05 – 0.2 um (4 steps) Nano: 1 – 10 nm (4 steps)
Condenser Lens Aperture	10, 30, 50, 100 um
Objective Length Aperture	10, 30, 70, 150 um
Selective Area Aperture (ED)	20, 50, 100, 250 um
Probe size	Micron 1-4 = 50 – 200 nm Nano 1-4 = 1 nm, 2 nm, 4 nm, 10 nm