Plasma Cleaner

Plasma CleanerPlasma Cleaner

South Bay Technology PC 2000 RF

 

The PC 2000 is a compact, easy to use, parallel plate plasma cleaning system designed specifically for the removal of hydrocarbon contamination from a specimen and/or a specimen stage.  The specimen and stage are subjected to reactive gas plasma, which efficiently removes a wide range of contaminants.  The specimen can be placed on the 8 inch diameter stage or mounted in a TEM holder.  Our unit has both an Argon and Oxygen supply.  Samples can be cleaned with an Ar, O2 or mixed gas plasma.

Specifications:
RF Power: 150W maximum forward power
Base Pressure: 2x 10-2 torr, reached in 1 minute
Operating pressure: 20 – 200 millitorr (user variable)
Plasma Cleaner 2