Electron Probe Micro Analyzer  (EPMA)

DividerJEOL JXA-8530F Field Emission Electron Probe Microanalyzer (EPMA) with JEOL XEDS & xCLent Cathodoluminescence

This EPMA’s FE electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a W filament or a LaB6 tip. The FE electron gun is capable of producing a micro probe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for WDS analyses with high X-ray spatial resolution.


Technical Specs:

  • Detectable Elements:
    • WDS: (Be*) B to U
    • EDS: B to U
      *with optional analyzing crystal for Be analysis
  • X-Ray Range:
    • WDS: 0.087 to 9.3 nm
    • EDS energy range: 20keV
  • Maximum Sample Size: 100mm x 100mm x 50mm (H)
  • Accelerating Voltage: 1 to 30 kV (0.1 kV steps)
  • Probe Current Range: 10-12 to 5x10-7
  • Beam Current Stability: ± 0.3%/h
  • 3 nm (WD 11 mm, 30kV)
  • Minimum Probe Size:
    • 40nm (10kV, 1x10-8A)
    • 100nm (10kV, 1x10-7A)
  • Scanning Magnification: 40 to 300,000x (WD 11mm)
  • Scanning Image Resolution: Maximum 5120 x 3840
  • Color Display:
    • For EPMA analysis: LCD 1280 x 1024
    • For SEM operation and EDS analysis: LCD 1280 x 1024


Safety and Training Requirements:

This device requires on-site, in person training prior to use.

Prior to usage of equipment review the following safety pages.


Photo of the EMPA

Facility: Characterization
Location: SB 60

User Guide

New User? See sign up instructions here.
Existing User? Link to FOM here.

Divider Emergencies dial 4-2121 for Pitt PoliceDivider


Supervisor: Susheng Tan

Phone: 412-383-5978
Email: sut6@pitt.edu



Co-Supervisor: Mike McDonald

Phone: 412-383-5977
Email: mlm97@pitt.edu



General Contact Info:
Facility Phone: 412-383-8001
Facility Email: nfcf@nano.pitt.edu

Benedum Hall
3700 O'Hara Street
Pittsburgh, PA 15261
NFCF Lab, SB 60-63