NanoScale Fabrication and Characterization
Facility (NFCF) is a user facility in 4,000 ft2 clean-room
environment (class 100, 1,000 and 10,000 areas),
located in the sub-basement of Benedum Hall.
NFCF is designed to support fabrication and
characterization of nanoscale materials and
structures, and integration of devices at all
length scales. The facility houses advanced
equipment with core nano-level (20 nm or below)
capability for fabrication and characterization,
including electron-beam lithography system,
dual-beam system, plasma etching, thin film
deposition, TEM, multifunctional scanning probe
station, and modular XRD.
PINSE Co-directors:
Hong Koo Kim, Ph.D. (kim@engr.pitt.edu;
412-624-9673)
Hervoje Petek, Ph.D. (petek@ptt.edu;
412-624-3599)
Facility Manager:
Mike McDonald (mlmcdonald@nano.pitt.edu;
412-383-8001)
NanoScale Fabrication and Characterization
Facility
Petersen Institute of NanoScience and
Engineering
University of Pittsburgh
