Hoods

(In all hoods, there are solvents: Acetone/IPA/Methanol, and DI water)

 

Acid Hood, processes available:

Lactic Acid

Sulfuric Acid

Hydrochloric Acid (38%)

Hydrogen Peroxide (30%)

Hydrofluoric Acid (48%)

Phosphoric Acid

Nitric acid

Gold Etchant – Type TFA

Buffered Oxide Etch, 7:1 with Surfactant

Buffered Oxide Etch, 10:1 with Surfactant

Cr etchant-Transene 1020

Citric Acid

Al etchant- Transene type D

 

Developer hood , chemistry available:

SU-8 Developer (for SU8 and Nanoscribe IP resist)

1165 Remover

Remover PG

Surpass 3000 (promotor)

MIBK/IPA 1:3

AZ 400T Stripper

ZEP 520A Developer (n-Amyl acetate, 99%)

ZEP520A Remover

 

Inorganic cabinet:

Remover R404 S

Developer ma-D 525

351 (UN 1824 Sodium Hydroxide Solution)

AZ 300 MIF Developer

AZ 400K 1:4

351 MF-CD-26 Developer

Ammonium Sulfide (NH4)2S

 

Spinner hood 1:

AZ 400K 1:4

351 MF-CD-26 Developer

Ammonium Sulfide (NH4)2S

AZ 400K 1:4

351 MF-CD-26 Developer

Ammonium Sulfide (NH4)2S

AZ 400K 1:4

AZ P4210

AZ P4110

AZ P4620

LOR 5B

AZ 5214-E IR

AquaSAVE 532A

Spinner hood 2:

PMMA 950K A1

PMMA 950K A2

PMMA 950K A3

PMMA 950K A4

PMMA 495K A4

ZEP 520A

ZEP 520A 1.7:1 Diluted

MCC 80/20 Primer

HMDS Primer

MHA

PMMA thinner

mma(8.5) MAA EL9

mma(8.5) MAA EL13

ma-N 2403

ZEP 520A 2.5:1

ZEP 520A 3.5:1 (weight)

Anisole, 99%, Extra Dry AcroSeal

Acrylic Polymer

PEG-A

 

Photo of Spinner Hoods

Contact

Mike McDonald or Jun Chen

 

Check Availability

Already have an account?

Reserve this tool with the FOM.

Need an Account?

Get Started

 

Equipment Fee

Fabrication Service 1