Electron Beam Evaporation System

The Thermionics electron beam evaporation system is a physical vapor deposition technique which utilizes an intense electron beam to vaporize a source material under high vacuum. This technique is compatible with a wide variety of source materials and offers a wide range of well-controlled deposition rates.

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Key Features

  • 3 kW 4 pocket e-Gun
  • Thickness monitor
  • Sample heater
  • Substrates up to 100 mm
  • Substrate rotation
  • Available materials: Al, Au, Ti, Ni, Cr, Ge, Ag, AuGe, Invar and other per request

 

Key Applications and available processes

  • Electronic and Optical Semiconductor films
  • Wear resistant and thermal barrier coatings

Photo of the Thermionics

General Documentation

ebeam evaporation system SOP (standard operation procedure)


Contact

Michael McDonald or Matt France


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Equipment Fee

Fabrication Service 1