Thermionics Electron Beam Evaporation System
The Thermionics electron beam evaporation system is a physical vapor deposition technique which utilizes an intense electron beam to vaporize a source material under high vacuum. This technique is compatible with a wide variety of source materials and offers a wide range of well-controlled deposition rates.
………………………………………………………………………………………………………………………………………………………………………………………………
Key Features
- 3 kW 4 pocket e-Gun
- Thickness monitor
- Sample heater
- Substrates up to 100 mm
- Substrate rotation
- Available materials: Al, Au, Ti, Ni, Cr, Ge, Ag, AuGe, Invar and other per request
Key Applications and available processes
- Electronic and Optical Semiconductor films
- Wear resistant and thermal barrier coatings
General Documentation
ebeam evaporation system SOP (standard operation procedure)
Contact
Check Availability
Already have an account?
Reserve this tool with the FOM.
Need an Account?
Equipment Fee
Fabrication Service 1
