KLA-Tencor AlfaStep IQ Surface Profilometer

The Alpha‐Step IQ Profiler is a computerized, high sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. It features the ability to measure micro‐roughness, with up to 1Å (0.004 μin.) or less resolution, over short distances as well as waviness in a scan over a full surface length of 10‐mm (0.4-in.). The computer offers powerful measurement control, data storage, analysis, and networking. 

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Key Features

 

  • Measurement of vertical features ranging from under 100 Å (0.4 μin.) to approximately 0.4mm (15.7  mils), with a vertical resolution of 0.012 Å or 0.24 Å respectively. 
  • The horizontal resolution is only limited by the stylus radius and not by the number of data points.  However, the minimum spacing between two data points is 0.01 μm. 
  • Measurement of many roughness and waviness parameters with roughness and waviness separated by user   selectable cutoff filters. 
  • Ability to fit and level data, allowing accurate measurements on curved surfaces. 
  • Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements. 
  • Accommodation of samples up to 150 mm (6 in.) wide and 21 mm (.83 in.) thick. 

 

Key Applications and available processes

  • Film Thickness/Etch
  • MEMS
  • Optoelectronics
  • Ceramics
  • Data Storage

General Documentation

Surface Profiler SOP (standard operation procedure)

Photo of the Surface Profiler

Contact

Michael McDonald or Jun Chen

 

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Equipment Fee

Fabrication Service 1