KLA-Tencor AlfaStep IQ Surface Profilometer
The Alpha‐Step IQ Profiler is a highly sensitive, computerized surface profiler that measures roughness, undulation, and step height in a variety of applications. It features the ability to measure micro‐roughness over short distances with up to 1Å (0.1 nm) or less resolution, as well as the undulation of a sample up to 10 mm (0.4 in) long. The computer offers powerful measurement control, data storage, analysis, and networking.
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Key Features
- Measurement of vertical features ranging from under 100 Å (0.4 μin.) to approximately 0.4mm (15.7 mils), with a vertical resolution of 0.012 Å or 0.24 Å respectively.
- The horizontal resolution is only limited by the stylus radius and not by the number of data points. However, the minimum spacing between two data points is 0.01 μm.
- Measurement of many roughness and waviness parameters with roughness and waviness separated by user selectable cutoff filters.
- Ability to fit and level data, allowing accurate measurements on curved surfaces.
- Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.
- Accommodation of samples up to 150 mm (6 in.) wide and 21 mm (.83 in.) thick.
Key Applications and available processes
- Film Thickness/Etch
- MEMS
- Optoelectronics
- Ceramics
- Data Storage
General Documentation
Surface Profiler SOP (standard operation procedure)
Contact
Jun Chen, Esta Abelev, or Dan Lamont
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Equipment Fee
Fabrication Service 1
