Scanning Probe Microscope (SPM/AFM)

Atomic Force microscopy is an imaging and surface probing technique that can be used to determine sample roughness, to perform topographic surface imaging, and to measure a wide range of surface properties as a function of position. 3D imaging is possible for samples with sample height variations of less than 5 microns. Our SPM is controlled by Veeco’s Nanoscope V controller and can generate up to 5120 x 5120 pixel density, as well as acquire and display up to 8 images simultaneously. The Multimode V SPM routinely achieves atomic resolution both in air and liquid while the Dimension V SPM is able to characterize samples of wafer size with sub-nm resolution.

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Photo of the SPM

Key Features

  • Can generate up to 5120 x 5120 pixel density and acquire up to 8 images simultaneously
  • Atomic Force Microscope (AFM)
  • Lateral Force Microscope (LFM)
  • Magnetic Force Microscope (MFM)
  • Electrostatic Force Microscopy (MFM)
  • Scanning Capacitance Microscopy (SCM)
  • Tunneling and Conducting AFM (TUNA-2)
  • Scanning Capacitance Microscopy (SSRM)
  • Torsional Force Microscope

 

General Documentation 

SPM SOP (standard operation procedure)

 

Contact

Susheng Tan  

 

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Equipment Fee

Characterization Service 1