Plasma Cleaner

South Bay Technology PC 2000 RF is a compact, easy to use, parallel plate plasma cleaning system designed specifically for the removal of hydrocarbon contamination from a specimen and/or a specimen stage.  The specimen and stage are subjected to reactive gas plasma, which efficiently removes a wide range of contaminants.  The specimen can be placed on the 8 inch diameter stage or mounted in a TEM holder.  Our unit has both an Argon and Oxygen supply.  Samples can be cleaned with an Ar, O2 or mixed gas plasma.

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Plasma Cleaner

Key Features and Applications

  • RF Power: 150W maximum forward power
  • Base Pressure: 2x 10-2 torr, reached in 1 minute
  • Operating pressure: 20 – 200 millitorr (user variable)

 

General Documentation

Plasma Cleaner SOP (standard operation procedure)

 

 

Contact

Susheng Tan and Mike McDonald 

 

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Equipment Fee

Characterization Service 1