Plasma Cleaner
South Bay Technology PC 2000 RF is a compact, easy to use, parallel plate plasma cleaning system designed specifically for the removal of hydrocarbon contamination from a specimen and/or a specimen stage. The specimen and stage are subjected to reactive gas plasma, which efficiently removes a wide range of contaminants. The specimen can be placed on the 8 inch diameter stage or mounted in a TEM holder. Our unit has both an Argon and Oxygen supply. Samples can be cleaned with an Ar, O2 or mixed gas plasma.
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Key Features and Applications
- RF Power: 150W maximum forward power
- Base Pressure: 2x 10-2 torr, reached in 1 minute
- Operating pressure: 20 – 200 millitorr (user variable)
General Documentation
Plasma Cleaner SOP (standard operation procedure)
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Equipment Fee
Characterization Service 1
