JEOL SEM
JEOL JSM-6510LV/LGS Scanning Electron Microscope (SEM) with Oxford Aztec - The JSM-6510 is a field-emission electron microscope capable of imaging standard samples in high vacuum mode, as well as non-conductive, wet samples in low vacuum mode. A user-customizable graphic user interface (GUI) has automatic functions, recipes (standard & custom applications settings), multiple live image display, signal mixing, a desktop publisher, and a searchable image database for comfortable operation from observation to report creation.
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Key Features
- Specimen chamber accepts up to 5" diameter x 50mm samples
- High Vacuum Mode:
Resolution
3.0nm guaranteed (30kV, SE)
8.0nm guaranteed (3kV, SE)
5nm guaranteed (1kV, SE)
- Image Modes:
Secondary electron image (SE).
Backscattered electron image (BSE) detected by the SE Detector
Backscattered electron image detected by multi-element solid-state BSE detector.
(composition, topography, shadow and extreme shadow images)
- Low Vacuum Mode:
LV Specimen Chamber Pressure: 10 to 270 Pa
Resolution: 4.0nm guaranteed (30kV, BSE)
Image modes: Backscattered electron image (BSE) (composition, topography, shadow & extreme shadow images)
- Magnification: 5X to 300,000X
- Accelerating Voltage: 0.5kV to 30kV
- EDS – Oxford detector with Aztec software
General Documentation
JEOL SEM SOP (standard operation procedure)
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Equipment Fee
Characterization Service 1
