JEOL SEM

JEOL JSM-6510LV/LGS Scanning Electron Microscope (SEM) with Oxford Aztec - The JSM-6510 has both standard high vacuum mode as well as Low vacuum mode.  Low vacuum SEM mode enables one to observe and analyze non-conductive, wet, non-high vacuum compatible specimens. 

User-customizable graphic user interface (GUI) has automatic functions, recipes (standard & custom applications settings), multiple live image display, signal mixing, a desktop publisher and a browse able image database for comfortable operation from observation to report creation.

 

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Key Features

  • Specimen chamber accepts up to 5" diameter x 50mm samples
  • High Vacuum Mode:

Resolution

3.0nm guaranteed (30kV, SE)

8.0nm guaranteed (3kV, SE)

5nm guaranteed (1kV, SE)

  • Image Modes:

Secondary electron image (SE).

Backscattered electron image (BSE) detected by the SE Detector

Backscattered electron image detected by multi-element solid-state BSE detector. (composition, topography, shadow and extreme shadow images).

  • Low Vacuum Mode:

LV Specimen CHamper Pressure: 10 to 270 Pa

Resolution: 4.0nm guaranteed (30kV, BSE)

Image modes: Backscattered electron image (BSE) (composition, topography, shadow & extreme shadow images)

  • Magnification: 5X to 300,000X
  • Accelerating Voltage: 0.5kV to 30kV
  • EDS – Oxford detector with Aztec software

  

Photo of the JEOL SEM

General Documentation 

JEOL SEM SOP (standard operation procedure)

 

Contact

Michael McDonald or Susheng Tan

 

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Equipment Fee

Characterization Service 1