Filmetrics F40 Thin Film Analyzer
The Filmetrics F40 Thin-Film Analyzer is a tabletop tool capable of quick and reliable measurement of thickness and optical constants (n and k) of transparent thin films. This system is equipped with a visible to NIR light source suitable for the measurement of films thicknesses in the range of 20 nm – 150 µm.
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Key Features
- Thin film measurement tool
- Suitable for 20 nm – 150 µm film thickness
- 20-micron sampling aperture / 15 X reflecting objective
- Extensive material library & recipe development resources
Key Applications and available processes
- Easy measurement of thickness and/or optical constants of transparent thin film
- Applicable to oxide, nitrides, resist, polysilicon, and other optical coating
- Quickly and monitor and evaluate processing steps
- Not suitable for use with very rough or opaque films
General Documentation
F40 Thin FIlm Analyzer General Operation SOP (Standard Operating Procedure)
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Equipment Fee
Fabrication Service 1
