FEI Scios Dual Beam System

FEI Scios™ is an ultra-high-resolution analytical DualBeam™ system that delivers outstanding 2D and 3D performance for a broad range of samples, including magnetic material. A 110 mm stage tilts up to 90˚ and provides a long, eucentric working distance for great flexibility. FEI Scios easily accommodates a wide range of sample types and data collection techniques while simultaneously allowing maximum energy dispersive x-ray spectroscopy (EDS) signal detection at the FIB and SEM coincidence point. TEAM™ Pegasus is a world-class materials characterization solution providing users with both elemental composition and crystal structure results in one easy-to-use EDS-EBSD package. Smart Features in the TEAM™ software streamline analysis and facilitate workflow, while optimizing data quality and helping EDAX users solve their characterization problems quickly and more efficiently.

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Key Features

  • Imaging Detectors: In-lens (T1, T2), CBS/ABS (Backscatter), ETD (Secondary), STEM w/ HAADF
  • FIB milling with Gallium
  • Platinum Deposition
  • Selective Carbon Mill
  • Easy-Lift Needle Manipulator for TEM lamellas
  • EDX Elemental Analysis to identify which elements are present in the sample
  • EBSD for grain orientation mapping

Key Applications and available processes

  • TEM sample preparation
  • Cross Sectioning
  • EDS/EBSD analysis
  • Nanofabrication/Patterning

 

Photo of the FEI Dual BeamGeneral Documentation

SOP (standard operation procedure)

Scios FIB Dual Beam System Specimen Preparation SOP

Scios FIB Dual Beam System EBSD Analysis SOP

 

Contact

Susheng Tan or Jun Chen

 

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Equipment Fee

Characterization Service 2