Apreo Scanning Electron Microscope with EDAX EDS and EBSD
The ThermoFisher Apreo HiVac SEM is a Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high and low-voltage ultra-high resolution capabilities with an electrostatic lens design. The instrument features beam deceleration and unique in-lens detection offering unprecedented contrast and versatility to researchers working with a variety of materials and devices. Achievable resolution is 0.8nm at 15kV and 1.0nm at 1kV using the immersion lens. The Apreo SEM is equipped with EDAX EDS and EBSD detectors. ……………………………………………………………………………………………………………………………………………………………………………………………………………………………..
Key Features
- Large capacity 5-axis stage with Nav-Cam visual navigation, greatly increasing ease of use and sample throughput
- Beam current range: 0.78pA - 100nA
- Accelerating voltage up to 30kV, with landing energy as low as 20eV
- Everhart-Thornley detector (with secondary and backscatter modes)
- In-column detectors
- Sub-nanometer imaging resolution at high kV; ~ 1nm resolution at 1kV
- Directional backscatter (DBS) detector
- EBSD: EDAX Hikari
- EDS: EDAX Elite 150 SDD with 127eV resolution
General Documentation
FEI Apreo SEM (standard operation procedure)
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Equipment Fee
Characterization Service 3
