The NFCF supports the fabrication and characterization of nanoscale materials and structures, and integration of devices at all length scales. The facility houses advanced equipment with core nano-level (20 nm or below) capability for fabrication and characterization, including electron-beam lithography system, dual-beam system, plasma etching, thin film deposition, TEM, multifunctional scanning probe station, modular XRD, and more (see Facilities and Equipment).
Events
There are no events to display.
In the news
Equipment updates
- Wire Bonder - installed and available.
- AFM added heater-cooler installed and available
- EBPG EBL - installed and available. 4 inch wafer upgrade installed. User guide in development.
- ADT Dicing Saw - installed and available, SOP in production
- XPF - installed and available, SOP in production
- Heidelberg MLA 150 - ordered, company leadtime pending for build
- Hotplate tower - tower installed, individual hot plates expected January 2024
- Horiba Ellipsometer - ordered, company leadtime pending for build
- Raman and XRD replacements from water damage event ordered and pending company production
- Hood 3 upgrade - ordered, lead time pending for build
- XPS - order pending, 10-12 month lead time expectation arrive January 2025
COVID-19 Ongoing Considerations
- Current COVID-19 Mitigation Protocol allows for masks optional during low and medium risk times. Cleanroom access requires mouth and nose covering for particulate control, of either mask or beard cover type as provided.
- Exterior building access is limited in hours and to specific doors, extended access may be available on approval.